Konsep Inti
Demonstration of manufacturing high-coherence superconducting transmon qubits using advanced industrial 300 mm CMOS fabrication processes, enabling scalable quantum computing.
Abstrak
The article presents a breakthrough in the fabrication of superconducting qubits, the key building blocks of quantum computers. The researchers have successfully demonstrated the manufacturing of high-coherence transmon qubits using advanced 300 mm complementary metal-oxide-semiconductor (CMOS) fabrication processes typically used in the semiconductor industry.
The key highlights are:
- Superconducting transmon qubits were fabricated in a 300 mm CMOS pilot line using only optical lithography and reactive-ion etching, without the need for specialized techniques like metal lift-off, angled evaporation, and electron-beam writing.
- The resulting qubits exhibited relaxation and coherence times exceeding 100 μs, on par with conventional laboratory-style fabrication methods.
- Large-scale statistics across the wafer showed consistent performance, yield, and stability, validating the scalability of this approach.
- This industry-scale fabrication process offers the potential for further upscaling through 3D integration and process optimization, marking a significant step towards the realization of practical quantum computers.
Statistik
The relaxation and coherence times of the fabricated superconducting qubits exceeded 100 μs.
Kutipan
"The presented industry-scale fabrication process, which uses only optical lithography and reactive-ion etching, has a performance and yield in line with conventional laboratory-style techniques utilizing metal lift-off, angled evaporation and electron-beam writing."
"This result marks the advent of an alternative and new, large-scale, truly CMOS-compatible fabrication method for superconducting quantum computing processors."