
Demonstration of manufacturing high-coherence superconducting transmon qubits using advanced industrial 300 mm CMOS fabrication processes, enabling scalable quantum computing.


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Superconducting transmon qubits have been fabricated in a 300 mm complementary metal–oxide–semiconductor (CMOS) pilot line using industrial fabrication methods, achieving relaxation and coherence times exceeding 100 μs.

Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers - Nature

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Scaling Superconducting Qubit Fabrication to 300 mm Wafers Using Advanced CMOS Manufacturing Techniques
